Toward Energy-efficient Physical Vapor Deposition - Routes for Replacing Substrate Heating during Magnetron Sputtering by Employing Metal Ion Irradiation
- Författare
- Linköpings universitet Xiao Li
- (Xiao Li., Funding: The research was primarily financed by the Swedish Research Council (VR) Grant 2018-03957 and the Swedish Energy Agency Grant 51201-1. Additional support was also received from a Knut and Alice Wallenberg Foundation Scholar Grant (Hultman: KAW2016.0358), the Competence Center Functional Nanoscale Materials (FunMat-II) VINNOVA grant 2016-05156, the VINNOVA grant 2019-04882, the Carl Tryggers Stiftelse contracts CTS 17:166, CTS 15:219 and CTS 14:431.The work supported by the Swedish research council VR-RFI (2017-00646_9) for the accelerator-based ion-technological center and from the Swedish Foundation for Strategic Research (Per Persson: RIF14-0053) for the Tandem accelerator laboratory in Uppsala University is also acknowledged., Härtill 5 uppsatser, Diss. (sammanfattning) Linköping : Linköpings universitet, 2023)
- Genre
- Avhandlingar, theses
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| Department of Physics, Chemistry and Biology, Linköping University | 2023 | Sverige, Linköping | xiv, 41 sidor illustrationer | 978-91-8075-241-1 |